The SCA61T-FA1H1G is a 3D-MEMS-based 1-axis Inclinometer that provides instrumentation grade performance for levelling applications. Low temperature dependency, high resolution and low noise together with robust sensing element design make the SCA61T ideal choice for levelling instruments. The Murata inclinometers are insensitive to vibration, due to their over damped sensing elements and can withstand mechanical shocks of 20000g. Comprehensive failure detection features of the device are - true self test by deflecting the sensing elements' proof mass by electrostatic force, continuous sensing element interconnection failure check and Continuous memory parity check.
±90° Measuring ranges
0.0025° Resolution (10Hz BW, analogue output)
Sensing element controlled over damped frequency response (-3dB 18Hz)
